A Reactive Molecular Dynamics Study of Atomistic Mechanisms during Synthesis of MoS2 Layers by Chemical Vapor Deposition

  • Sungwook Hong
  • , Aravind Krishnamoorthy
  • , Chunyang Sheng
  • , Rajiv K. Kalia
  • , Aiichiro Nakano
  • , Priya Vashishta

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)307-311
Number of pages5
JournalMRS Advances
Volume3
Issue number6-7
DOIs
StatePublished - 2018
Externally publishedYes

ASJC Scopus Subject Areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Keywords

  • chemical vapor deposition (CVD) (chemical reaction)
  • nanostructure
  • simulation

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