Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

ME Mills; P Townsend; D Castillo; S Martin; A Achen

doi:10.1016/S0167-9317(96)00061-5

Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

ME Mills
, P Townsend
, D Castillo
, S Martin
, A Achen

Psychological Science

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	327-334
Number of pages	8
Journal	Microelectronic Engineering
Volume	33
Issue number	1-4
DOIs	https://doi.org/10.1016/S0167-9317(96)00061-5
State	Published - Jan 1997

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@article{87ca0350517e48f98c100975b691ab85,

title = "Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material",

author = "ME Mills and P Townsend and D Castillo and S Martin and A Achen",

year = "1997",

month = jan,

doi = "10.1016/S0167-9317(96)00061-5",

language = "English",

volume = "33",

pages = "327--334",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

AU - Mills, ME

AU - Townsend, P

AU - Castillo, D

AU - Martin, S

AU - Achen, A

PY - 1997/1

Y1 - 1997/1

UR - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=lmupure2024&SrcAuth=WosAPI&KeyUT=WOS:A1997WK70100038&DestLinkType=FullRecord&DestApp=WOS_CPL

U2 - 10.1016/S0167-9317(96)00061-5

DO - 10.1016/S0167-9317(96)00061-5

M3 - Article

SN - 0167-9317

VL - 33

SP - 327

EP - 334

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4

ER -

Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

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