Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

ME Mills; P Townsend; D Castillo; S Martin; A Achen

doi:10.1016/S0167-9317(96)00061-5

Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

ME Mills, P Townsend, D Castillo, S Martin, A Achen

Psychological Science

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	327-334
Number of pages	8
Journal	Microelectronic Engineering
Volume	33
Issue number	1-4
DOIs	https://doi.org/10.1016/S0167-9317(96)00061-5
State	Published - Jan 1997

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title = "Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material",

author = "ME Mills and P Townsend and D Castillo and S Martin and A Achen",

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AU - Achen, A

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Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

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