Sputter deposition conditions and penetration depth in NbN thin films

Roger Hu; George L. Kerber; Jerome Luine; Eric Ladizinsky; John Bulman

doi:10.1109/TASC.2003.812227

Sputter deposition conditions and penetration depth in NbN thin films

Roger Hu, George L. Kerber, Jerome Luine, Eric Ladizinsky, John Bulman

Physics

Northrop Grumman Aerospace Systems

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	3288-3291
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	13
Issue number	2 III
DOIs	https://doi.org/10.1109/TASC.2003.812227
State	Published - Jun 2003
Event	2002 Applied Superconductivity Conference - Houston, TX, United States Duration: Aug 4 2002 → Aug 9 2002

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

Keywords

NbN
Penetration depth
TiN

Access to Document

10.1109/TASC.2003.812227

Cite this

@article{6234dc029ce44fb7ae34f6760c34c6c5,

title = "Sputter deposition conditions and penetration depth in NbN thin films",

keywords = "NbN, Penetration depth, TiN",

author = "Roger Hu and Kerber, {George L.} and Jerome Luine and Eric Ladizinsky and John Bulman",

year = "2003",

month = jun,

doi = "10.1109/TASC.2003.812227",

language = "English",

volume = "13",

pages = "3288--3291",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers",

number = "2 III",

note = "2002 Applied Superconductivity Conference ; Conference date: 04-08-2002 Through 09-08-2002",

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TY - JOUR

T1 - Sputter deposition conditions and penetration depth in NbN thin films

AU - Hu, Roger

AU - Kerber, George L.

AU - Luine, Jerome

AU - Ladizinsky, Eric

AU - Bulman, John

PY - 2003/6

Y1 - 2003/6

KW - NbN

KW - Penetration depth

KW - TiN

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U2 - 10.1109/TASC.2003.812227

DO - 10.1109/TASC.2003.812227

M3 - Conference article

AN - SCOPUS:0041974873

SN - 1051-8223

VL - 13

SP - 3288

EP - 3291

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2 III

T2 - 2002 Applied Superconductivity Conference

Y2 - 4 August 2002 through 9 August 2002

ER -

Sputter deposition conditions and penetration depth in NbN thin films

ASJC Scopus Subject Areas

Keywords

Access to Document

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